Mechanics of microelectromechanical systems /
Lobontiu, Nicolae.
Mechanics of microelectromechanical systems / Nicolae Lobontiu, Ephrahim Garcia. - New York : Kluwer Academic, c2005. - xi, 405 p. : ill. ; 25 cm.
Includes bibliographical references and index.
Stiffness Basics.- Microcantilevers, Microhinges, Microbridges.- Microsuspensions.- Microtransduction: Actuation and Sensing.- Static Response of Mems.- Microfabrication, Materials, Precision and Scaling.
"This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer's viewpoint as devices that transform an input form of energy into output mechanical motion (in the case of actuation) or that can operate with the reversed functionality (as in sensors) and convert an external stimulus, such as mechanical motion, into (generally) electric energy."--Jacket.
1402080131 0387230378 (ebook)
2004304912
Microelectromechanical systems.
TK7875 / .L63 2005
621 / L.N.M
Mechanics of microelectromechanical systems / Nicolae Lobontiu, Ephrahim Garcia. - New York : Kluwer Academic, c2005. - xi, 405 p. : ill. ; 25 cm.
Includes bibliographical references and index.
Stiffness Basics.- Microcantilevers, Microhinges, Microbridges.- Microsuspensions.- Microtransduction: Actuation and Sensing.- Static Response of Mems.- Microfabrication, Materials, Precision and Scaling.
"This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer's viewpoint as devices that transform an input form of energy into output mechanical motion (in the case of actuation) or that can operate with the reversed functionality (as in sensors) and convert an external stimulus, such as mechanical motion, into (generally) electric energy."--Jacket.
1402080131 0387230378 (ebook)
2004304912
Microelectromechanical systems.
TK7875 / .L63 2005
621 / L.N.M