Moems : Micro-Opto-Electro-mechnical systems /
Moems : Micro-Opto-Electro-mechnical systems /
Editor Manouchehr E. Motamedi.
- xxi, 614 pages : illustrations (black and white) ; 25 cm
Includes bibliographical references and index.
Introduction -- Microfabrication -- Micro-optics -- Actuation and sensing -- Micro-optic components, testing, and applications -- Fiber optic systems -- Optical scanning -- Display and imaging systems -- Adaptive optics -- MEMS and MOEMS CAD and simulation -- MEMS and MOEMS packaging -- MEMS and MOEMS materials -- problems and exercise -- index.
9788122428339
Microelectromechanical systems.
Optoelectronic devices.
Micromachining.
621.381 / M
Includes bibliographical references and index.
Introduction -- Microfabrication -- Micro-optics -- Actuation and sensing -- Micro-optic components, testing, and applications -- Fiber optic systems -- Optical scanning -- Display and imaging systems -- Adaptive optics -- MEMS and MOEMS CAD and simulation -- MEMS and MOEMS packaging -- MEMS and MOEMS materials -- problems and exercise -- index.
9788122428339
Microelectromechanical systems.
Optoelectronic devices.
Micromachining.
621.381 / M