TY  - BOOK
AU  - Zhang,Wendong
AU  - Chou,Xiujian
AU  - Shi,Tielin
AU  - Ma,Zongmin
AU  - Bao,Haifei
AU  - Chen,Jing
TI  - Measurement technology for micro-nanometer devices
SN  - 9781118717967 (cloth)
AV  - TA418.9.N35 Z445 2017
U1  - 681.2 23
PY  - 2017///]
CY  - Solaris South Tower, Singapore
PB  - John Wiley & Sons, Inc.
KW  - Microtechnology
KW  - Measurement
KW  - Nanotechnology
KW  - Microelectromechanical devices
KW  - Testing
KW  - Physical measurements
N1  - Includes bibliographical references and index; 	Introduction --
Geometry measurements at the micro/nanoscale --
Dynamic measurements at the micro/nanoscale --
Mechanical characteristics measurements --
SPM for MEMS/NEMS measurements --
MEMS online measurements --
Typical micro/nanoscale device measurements
N2  - Dealing with the technologies for measurement at the small scale, this book highlights the advanced research work from industry and academia in micro-nano devices test technology Written at both introductory and advanced levels, provides the fundamentals and theories
ER  -