TY  - BOOK
AU  - Lobontiu,Nicolae
AU  - Garcia,E.
TI  - Mechanics of microelectromechanical systems
SN  - 1402080131
AV  - TK7875 .L63 2005
U1  - 621 22
PY  - 2005///
CY  - New York
PB  - Kluwer Academic
KW  - Microelectromechanical systems
N1  - Includes bibliographical references and index; Stiffness Basics.- Microcantilevers, Microhinges, Microbridges.- Microsuspensions.- Microtransduction: Actuation and Sensing.- Static Response of Mems.- Microfabrication, Materials, Precision and Scaling
N2  - "This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer's viewpoint as devices that transform an input form of energy into output mechanical motion (in the case of actuation) or that can operate with the reversed functionality (as in sensors) and convert an external stimulus, such as mechanical motion, into (generally) electric energy."--Jacket
UR  - http://www.loc.gov/catdir/enhancements/fy0819/2004304912-d.html
UR  - http://www.loc.gov/catdir/enhancements/fy0819/2004304912-t.html
UR  - http://repository.fue.edu.eg/xmlui/handle/123456789/3921
ER  -