Moems : Micro-Opto-Electro-mechnical systems - Motamedi, Manouchehr E. (New Delhi : New age international, 2010)
Introduction -- Microfabrication -- Micro-optics -- Actuation and sensing -- Micro-optic components, testing, and applications -- Fiber optic systems -- Optical scanning -- Display and imaging systems -- Adaptive optics -- MEMS and MOEMS CAD and simulation -- MEMS and MOEMS packaging -- MEMS and MOEMS materials -- problems and exercise -- index.
Includes bibliographical references and index.
Keywords: Microelectromechanical systems; Optoelectronic devices; Micromachining