TY  - BOOK
AU  - Motamedi,Manouchehr E.
TI  - Moems: Micro-Opto-Electro-mechnical systems 
SN  - 9788122428339
U1  - 621.381 21
PY  - 2010///
CY  - New Delhi
PB  - New age international
KW  - Microelectromechanical systems
KW  - Optoelectronic devices
KW  - Micromachining
N1  - Includes bibliographical references and index; Introduction -- Microfabrication -- Micro-optics -- Actuation and sensing -- Micro-optic components, testing, and applications -- Fiber optic systems -- Optical scanning -- Display and imaging systems -- Adaptive optics -- MEMS and MOEMS CAD and simulation -- MEMS and MOEMS packaging -- MEMS and MOEMS materials -- problems and exercise -- index
ER  -