MEMS, bioMEMS and bioelectronics--materials and devices : symposium held November 28-December 2, 2011, Boston, Massachusetts, U.S.A. / editors, Tim Albrecht ... [et al.].

Contains proceedings of Symposia TT, II, and HH of the 2011 MRS Fall Meeting, held Nov. 28-Dec. 2, 2011, in Boston, Mass.

Includes bibliographical references and indexes.

Part I. MEMS - Materials and Devices: 1. Low profile packaging for MEMS aero-acoustic sensors -- 2. A detailed study of a novel wafer separation method for surface sensitive MEMS wafers -- 3. Acoustic energy: a new tool for MEMS manufacturing -- 4. In-situ observation and mechanical criterion on interface cracking in nano-components -- 5. Photo-thermal spectroscopic imaging of MEMS structures with sub-micron spatial resolution -- 6. Ti-TiOx-Pt metal-oxide-metal diodes fabricated via a simple oxidation technique -- 7. Harmonic excitation of surface acoustic waves on gallium nitride thin films for biological and chemical sensor applications -- 8. Method for achieving CMOS MEMS accelerometers with excellent built-in thermal stability and reduced charge damage -- 9. Coarse-grained molecular dynamics simulation of epoxy-based chemically-amplified resist for MEMS application -- Part II. BioMEMS - Materials and Devices: 10. A microfluidic assay for measuring electrical conductivity of gap junction channels -- 11. Development of electrochemiluminescence and surface plasmon resonance-based immunosensors with surface accumulable molecules -- 12. Enzymatic biofuel cell with self-regulating enzyme-nanotube ensemble films -- 13. Mechanically stable free-standing bilayer lipid membranes in microfabricated silicon chips -- 14. Functional design of porous drug delivery systems based on laser assisted manufactured nitinol -- 15. Nanostructured selenium for preventing biofilm formation on medical devices -- 16. Computer-assisted designing and biofabrication of 3-D hydrogel structures towards thick 3-D tissue engineering -- 17. Fabrication of complex hydrogel materials by utilizing microfluidics and micromolding -- 18. Implementation of bioMEMS for determining mechanical properties of biological cells -- 19. Towards next-generation proteomic assays: functional materials as sieving matrices and binding scaffolds -- 20. Nanoporous gold: a biomaterial for microfabricated drug-delivery platforms -- 21. Smart surfaces: use of electrokinetics for selective modulation of biomolecular affinities -- 22. Anisotropic cellular alignment on nano-wrinkled polymeric surface -- 23. Rapid and sensitive detection of cardiac markers in human serum using a surface acoustic wave immunosensor -- Part III. Bioelectronics - Materials, Properties, and Applications: 24. Cholesterol biosensor based on nanodiamond-polypyrrole conducting nanocomposite membrane -- 25. Electrical detection of protein biomarkers using nanoneedle biosensors -- 26. Electrical conduction along porphyrin wires using the self-consistent extended-Huckel and non-equilibrium Green's function methods -- 27. Density functional theory (DFT) computations of biological molecules for organic semiconductors -- 28. Optical trapping, biosensing, and spectroscopy in a single plasmonic platform -- 29. Application of wide band gap semiconductors to increase photocurrent in a protein-based photovoltaic device -- 30. Free-floating reaction centers (RCs) versus attached monolayer of RCs in bio-photoelectrochemical cells.