| 000 | 02448cam a22004818i 4500 | ||
|---|---|---|---|
| 999 |
_c12327 _d12327 |
||
| 001 | 18714601 | ||
| 005 | 20200923103909.0 | ||
| 008 | 150724s2017 si b 001 0 eng | ||
| 010 | _a 2015026167 | ||
| 020 | _a9781118717967 (cloth) | ||
| 020 | _z9781118717998 (epub) | ||
| 020 | _z9781118717981 (Adobe PDF) | ||
| 040 |
_aEG-NcFUE _beng _cEG-NcFUE _erda _dEG-NcFUE |
||
| 042 | _apcc | ||
| 050 | 0 | 0 |
_aTA418.9.N35 _bZ445 2017 |
| 082 | 0 | 0 |
_a681.2 _223 _bM. |
| 100 | 1 |
_aZhang, Wendong, _eauthor. |
|
| 245 | 1 | 0 |
_aMeasurement technology for micro-nanometer devices / _cWendong Zhang, Xiujian Chou, Zongmin Ma, North University of China, Tielin Shi, Huazhong Univ. of Science and Technology, Haifei Bao, Jing Chen, Liguo Chen, Chenyang Xue, Dachao Li, Tianjin University. |
| 263 | _a1701 | ||
| 264 | 1 |
_aSolaris South Tower, Singapore : _bJohn Wiley & Sons, Inc., _c[2017] |
|
| 264 | 4 | _c©2017 | |
| 300 |
_axii, 329 pages ; _c26 cm |
||
| 336 |
_atext _btxt _2rdacontent |
||
| 337 |
_aunmediated _bn _2rdamedia |
||
| 338 |
_avolume _bnc _2rdacarrier |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 505 | 0 | _a Introduction -- Geometry measurements at the micro/nanoscale -- Dynamic measurements at the micro/nanoscale -- Mechanical characteristics measurements -- SPM for MEMS/NEMS measurements -- MEMS online measurements -- Typical micro/nanoscale device measurements. | |
| 520 | _aDealing with the technologies for measurement at the small scale, this book highlights the advanced research work from industry and academia in micro-nano devices test technology Written at both introductory and advanced levels, provides the fundamentals and theories. | ||
| 650 | 0 |
_aMicrotechnology _xMeasurement. |
|
| 650 | 0 |
_aNanotechnology _xMeasurement. |
|
| 650 | 0 |
_aMicroelectromechanical devices _xTesting. |
|
| 650 | 0 | _aPhysical measurements. | |
| 700 | 1 |
_aChou, Xiujian, _eauthor. |
|
| 700 | 1 |
_aShi, Tielin, _eauthor. |
|
| 700 | 1 |
_aMa, Zongmin, _d1965- _eauthor. |
|
| 700 | 1 |
_aBao, Haifei, _eauthor. |
|
| 700 | 1 |
_aChen, Jing, _d1974- _eauthor. |
|
| 776 | 0 | 8 |
_iOnline version: _aZhang, Wendong, author. _tMeasurement technology for micro-nanometer devices _dSolaris South Tower, Singapore : John Wiley & Sons, Inc., [2016] _z9781118717981 _w(DLC) 2015032319 |
| 906 |
_a7 _brip _corignew _d1 _eecip _f20 _gy-gencatlg |
||
| 942 |
_2ddc _cBK |
||