000			01911cam a22003617a 4500
999			_c5351 _d5351
001			13822187
005			20190506111818.0
008			041221s2005 nyua b 001 0 eng
010			_a 2004304912
020			_a1402080131
020			_a0387230378 (ebook)
040			_aUKM _cUKM _dDLC _erda
050	0	0	_aTK7875 _b.L63 2005
082	0	0	_a621 _222 _bL.N.M
100	1		_aLobontiu, Nicolae.
245	1	0	_aMechanics of microelectromechanical systems / _cNicolae Lobontiu, Ephrahim Garcia.
260			_aNew York : _bKluwer Academic, _cc2005.
264			_aNew York : _bKluwer Academic, _cc2005.
300			_axi, 405 p. : _bill. ; _c25 cm.
336			_2rdacontent _atext
337			_2rdamedia _aunmediated
338			_2rdacarrier _avolume
504			_aIncludes bibliographical references and index.
505	0		_aStiffness Basics.- Microcantilevers, Microhinges, Microbridges.- Microsuspensions.- Microtransduction: Actuation and Sensing.- Static Response of Mems.- Microfabrication, Materials, Precision and Scaling.
520			_a"This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer's viewpoint as devices that transform an input form of energy into output mechanical motion (in the case of actuation) or that can operate with the reversed functionality (as in sensors) and convert an external stimulus, such as mechanical motion, into (generally) electric energy."--Jacket.
650		0	_aMicroelectromechanical systems.
700	1		_aGarcia, E. _q(Ephrahim)
856	4	2	_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy0819/2004304912-d.html
856	4	1	_3Table of contents only _uhttp://www.loc.gov/catdir/enhancements/fy0819/2004304912-t.html
856	4	1	_3Abstract _uhttp://repository.fue.edu.eg/xmlui/handle/123456789/3921
942			_cBK _2ddc