| 000 | 01241nam a22002777i 4500 | ||
|---|---|---|---|
| 999 |
_c5599 _d5599 |
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| 005 | 20210921115033.0 | ||
| 008 | 120216s2010 ii a | |||| 00| 0 eng d | ||
| 020 | _a9788122428339 | ||
| 040 |
_aEG-NcFUE _erda |
||
| 082 | 0 | 4 |
_221 _a621.381 _bM |
| 245 | 0 | 0 |
_aMoems : _bMicro-Opto-Electro-mechnical systems / _cEditor Manouchehr E. Motamedi. |
| 264 | 1 |
_aNew Delhi : _bNew age international, _c2010. |
|
| 300 |
_axxi, 614 pages : _billustrations (black and white) ; _c25 cm |
||
| 336 |
_2rdacontent _atext |
||
| 337 |
_2rdamedia _aunmediated |
||
| 338 |
_2rdacarrier _avolume |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 505 | 0 | _aIntroduction -- Microfabrication -- Micro-optics -- Actuation and sensing -- Micro-optic components, testing, and applications -- Fiber optic systems -- Optical scanning -- Display and imaging systems -- Adaptive optics -- MEMS and MOEMS CAD and simulation -- MEMS and MOEMS packaging -- MEMS and MOEMS materials -- problems and exercise -- index. | |
| 650 | 0 | _aMicroelectromechanical systems. | |
| 650 | 0 | _aOptoelectronic devices. | |
| 650 | 0 | _aMicromachining. | |
| 700 | 1 |
_aMotamedi, Manouchehr E. _eeditor. |
|
| 942 |
_cBK _2ddc |
||