000 01679pam a2200349 i 4500
999 _c8888
_d8888
001 4906833
003 EG-NcFUE
005 20201228130916.0
008 940707s2010 maua b 001 0 eng
020 _a9781606500415 (hb)
020 _a1606500414 (hb)
020 _a9781606500439 (ebk.)
020 _a1606500430 (ebk.)
040 _aDLC
_cDLC
_dDLC
_efue
082 0 0 _a621.38152
_222
_bC.
245 0 0 _aCharacterization in compound semiconductor processing /
_ceditors, Yale Strausser and Gary E. McGuire ; consulting editor, C.R. Brundle ; managing editor, Lee E. Fitzpatrick.
264 1 _aBoston :
_bButterworth-Heinemann ;
_aGreenwich :
_bManning,
_c[2010]
264 1 _cc2010.
300 _axiv, 199 pages :
_billustartions ;
_c25 cm.
336 _atext
_2rdacontent
337 _aunmediated
_2rdamedia
338 _avolume
_2rdacarrier
490 0 _aMaterials characterization series
504 _aIncludes bibliographical references and index.
505 0 _tCharacterization of III-V thin films for electronic devices /
_rJ.N. Miller and T.S. Low --
_tIII-V compound semiconductor films for optical applications /
_rThomas F. Kuech --
_tContacts /
_rT. Sands and S.A. Schwarz --
_tDielectric insulating layers /
_rH.H. Wieder --
_tOther compound semiconductor films /
_rOwen K. Wu and David R. Rhiger --
_tDeep level transient spectroscopy : a case study on GaAs /
_rWerner K. Götz and Noble M. Johnson.
650 0 _aCompound semiconductors.
650 0 _aCompound semiconductors
_xSurfaces.
700 1 _aStrausser, Yale,
_eeditor.
700 1 _aMcGuire, G. E.
_eeditor.
906 _a7
_bcbc
_corignew
_d1
_eocip
_f19
_gy-gencatlg
942 _2ddc
_cBK