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Zhang, Wendong,

Measurement technology for micro-nanometer devices / Wendong Zhang, Xiujian Chou, Zongmin Ma, North University of China, Tielin Shi, Huazhong Univ. of Science and Technology, Haifei Bao, Jing Chen, Liguo Chen, Chenyang Xue, Dachao Li, Tianjin University. - xii, 329 pages ; 26 cm

Includes bibliographical references and index.

Introduction --
Geometry measurements at the micro/nanoscale --
Dynamic measurements at the micro/nanoscale --
Mechanical characteristics measurements --
SPM for MEMS/NEMS measurements --
MEMS online measurements --
Typical micro/nanoscale device measurements.

Dealing with the technologies for measurement at the small scale, this book highlights the advanced research work from industry and academia in micro-nano devices test technology Written at both introductory and advanced levels, provides the fundamentals and theories.

ISBN: 9781118717967 (cloth)

LCCN: 2015026167

Subjects--Topical Terms:
Microtechnology--Measurement.
Nanotechnology--Measurement.
Microelectromechanical devices--Testing.
Physical measurements.

LC Class. No.: TA418.9.N35 / Z445 2017

Dewey Class. No.: 681.2 / M.