MARC details
| 000 -LEADER |
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| fixed length control field |
02448cam a22004818i 4500 |
| 001 - CONTROL NUMBER |
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| control field |
18714601 |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
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| control field |
20200923103909.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
150724s2017 si b 001 0 eng |
| 010 ## - LIBRARY OF CONGRESS CONTROL NUMBER |
|---|
| LC control number |
2015026167 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
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| International Standard Book Number |
9781118717967 (cloth) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| Cancelled/invalid ISBN |
9781118717998 (epub) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| Cancelled/invalid ISBN |
9781118717981 (Adobe PDF) |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
EG-NcFUE |
| Language of cataloging |
eng |
| Transcribing agency |
EG-NcFUE |
| Description conventions |
rda |
| Modifying agency |
EG-NcFUE |
| 042 ## - AUTHENTICATION CODE |
|---|
| Authentication code |
pcc |
| 050 00 - LIBRARY OF CONGRESS CALL NUMBER |
|---|
| Classification number |
TA418.9.N35 |
| Item number |
Z445 2017 |
| 082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
681.2 |
| Edition number |
23 |
| Item number |
M. |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Zhang, Wendong, |
| Relator term |
author. |
| 245 10 - TITLE STATEMENT |
|---|
| Title |
Measurement technology for micro-nanometer devices / |
| Statement of responsibility, etc |
Wendong Zhang, Xiujian Chou, Zongmin Ma, North University of China, Tielin Shi, Huazhong Univ. of Science and Technology, Haifei Bao, Jing Chen, Liguo Chen, Chenyang Xue, Dachao Li, Tianjin University. |
| 263 ## - PROJECTED PUBLICATION DATE |
|---|
| Projected publication date |
1701 |
| 264 #1 - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
|---|
| Place of publication, distribution, etc |
Solaris South Tower, Singapore : |
| Name of publisher, distributor, etc |
John Wiley & Sons, Inc., |
| Date of publication, distribution, etc |
[2017] |
| 264 #4 - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
|---|
| Date of publication, distribution, etc |
©2017 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xii, 329 pages ; |
| Dimensions |
26 cm |
| 336 ## - CONTENT TYPE |
|---|
| Content type term |
text |
| Content type code |
txt |
| Source |
rdacontent |
| 337 ## - MEDIA TYPE |
|---|
| Media type term |
unmediated |
| Media type code |
n |
| Source |
rdamedia |
| 338 ## - CARRIER TYPE |
|---|
| Carrier type term |
volume |
| Carrier type code |
nc |
| Source |
rdacarrier |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc |
Includes bibliographical references and index. |
| 505 0# - FORMATTED CONTENTS NOTE |
|---|
| Formatted contents note |
Introduction --<br/>Geometry measurements at the micro/nanoscale --<br/>Dynamic measurements at the micro/nanoscale --<br/>Mechanical characteristics measurements --<br/>SPM for MEMS/NEMS measurements --<br/>MEMS online measurements --<br/>Typical micro/nanoscale device measurements. |
| 520 ## - SUMMARY, ETC. |
|---|
| Summary, etc |
Dealing with the technologies for measurement at the small scale, this book highlights the advanced research work from industry and academia in micro-nano devices test technology Written at both introductory and advanced levels, provides the fundamentals and theories. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Microtechnology |
| General subdivision |
Measurement. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Nanotechnology |
| General subdivision |
Measurement. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Microelectromechanical devices |
| General subdivision |
Testing. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Physical measurements. |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Chou, Xiujian, |
| Relator term |
author. |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Shi, Tielin, |
| Relator term |
author. |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Ma, Zongmin, |
| Dates associated with a name |
1965- |
| Relator term |
author. |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Bao, Haifei, |
| Relator term |
author. |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Chen, Jing, |
| Dates associated with a name |
1974- |
| Relator term |
author. |
| 776 08 - ADDITIONAL PHYSICAL FORM ENTRY |
|---|
| Display text |
Online version: |
| Main entry heading |
Zhang, Wendong, author. |
| Title |
Measurement technology for micro-nanometer devices |
| Place, publisher, and date of publication |
Solaris South Tower, Singapore : John Wiley & Sons, Inc., [2016] |
| International Standard Book Number |
9781118717981 |
| Record control number |
(DLC) 2015032319 |
| 906 ## - LOCAL DATA ELEMENT F, LDF (RLIN) |
|---|
| a |
7 |
| b |
rip |
| c |
orignew |
| d |
1 |
| e |
ecip |
| f |
20 |
| g |
y-gencatlg |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Source of classification or shelving scheme |
Dewey Decimal Classification |
| Koha item type |
Books |