Mechanics of microelectromechanical systems / Nicolae Lobontiu, Ephrahim Garcia.

By:

Lobontiu, Nicolae

Contributor(s):

Garcia, E. (Ephrahim)

Material type: Text

TextNew York : Kluwer Academic, c2005Description: xi, 405 p. : ill. ; 25 cmContent type:

text

Media type:

unmediated

Carrier type:

volume

ISBN:

1402080131
0387230378 (ebook)

Subject(s):

Microelectromechanical systems

DDC classification:

621 22 L.N.M

LOC classification:

TK7875 .L63 2005

Online resources:

Contents:

Stiffness Basics.- Microcantilevers, Microhinges, Microbridges.- Microsuspensions.- Microtransduction: Actuation and Sensing.- Static Response of Mems.- Microfabrication, Materials, Precision and Scaling.

Summary: "This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer's viewpoint as devices that transform an input form of energy into output mechanical motion (in the case of actuation) or that can operate with the reversed functionality (as in sensors) and convert an external stimulus, such as mechanical motion, into (generally) electric energy."--Jacket.

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Holdings
Item type	Current library	Collection	Call number	Status	Date due	Barcode
Books	Main library B2	Faculty of Engineering & Technology (Mechanical)	621 L.N.M (Browse shelf(Opens below))	Available		00005461

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Includes bibliographical references and index.

"This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer's viewpoint as devices that transform an input form of energy into output mechanical motion (in the case of actuation) or that can operate with the reversed functionality (as in sensors) and convert an external stimulus, such as mechanical motion, into (generally) electric energy."--Jacket.

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