Measurement technology for micro-nanometer devices / Wendong Zhang, Xiujian Chou, Zongmin Ma, North University of China, Tielin Shi, Huazhong Univ. of Science and Technology, Haifei Bao, Jing Chen, Liguo Chen, Chenyang Xue, Dachao Li, Tianjin University.

By:

Zhang, Wendong [author.]

Contributor(s):

Material type: Text

text

Media type:

unmediated

Carrier type:

volume

ISBN:

9781118717967 (cloth)

Subject(s):

Additional physical formats: Online version:: Measurement technology for micro-nanometer devicesDDC classification:

681.2 23 M.

LOC classification:

TA418.9.N35 Z445 2017

Contents:

Introduction -- Geometry measurements at the micro/nanoscale -- Dynamic measurements at the micro/nanoscale -- Mechanical characteristics measurements -- SPM for MEMS/NEMS measurements -- MEMS online measurements -- Typical micro/nanoscale device measurements.

Summary: Dealing with the technologies for measurement at the small scale, this book highlights the advanced research work from industry and academia in micro-nano devices test technology Written at both introductory and advanced levels, provides the fundamentals and theories.

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Item type	Current library	Collection	Call number	Status	Date due	Barcode
Books	Main library B8	Faculty of Engineering & Technology (Electrical)	681.2 M. (Browse shelf(Opens below))	Available		00015745

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Includes bibliographical references and index.

Introduction --
Geometry measurements at the micro/nanoscale --
Dynamic measurements at the micro/nanoscale --
Mechanical characteristics measurements --
SPM for MEMS/NEMS measurements --
MEMS online measurements --
Typical micro/nanoscale device measurements.

Dealing with the technologies for measurement at the small scale, this book highlights the advanced research work from industry and academia in micro-nano devices test technology Written at both introductory and advanced levels, provides the fundamentals and theories.

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